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Hymson Laser
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Products
OVERVIEW
Product Description
Automation TOPCon Laser Doping Machine
High boron surface concentration in the P++ layer will be increase but not oxidation in diffusion furnace when BSG (borosilicate glass) is used as the doping source. The laser doping and oxidation process is carried out when the P++ layer is used as the laser doping source, which can solve the problem of boron doping concentration and simplifying the preparation process of selecting the emitter.
ADVANTAGE
Product Advantages
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Adapt Hymson independent developed laser device & special optical circle design to BSG laser doping.
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According to customer requirement design & manufacture equipｍent to realize high productivity, high precision, high efficiency, lossless doping.
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Precision visual position, high speed flexible transimission, fragment lower 0.02%
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Basic Information
- Demension：Length×width×Height：5500*2300*2500（unincluding tricolor light, duster, cooling）
- Silicon wafer size：166/182/210/230
- Produce space：Length×width×Height：9600x3260x2800
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Product Performance
- Fragmentation rate：≤0.02%
- Graphic accuracy：±15um
- Alignment accuracy：±15um
- Capacity：182 size ≥8400pcs/h(grid line<132 ) 210 size ≥7300pcs/h(grid line<152 )
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Model classification
- HL-KZPCNS-HO
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